Integrated Dispense Systems have no mechanical displacement and are designed to monitor and dispense photolithography chemistries. With only one moving part in the dispense path, our patented pressure on demand dispense system features no bellows, diaphragms or stepper motors. Our patented designs offer on-board dispense detection and are designed to truly meet the needs of both the OEMs and End Users.
Our products support a wide range of applications, from low viscosity resists with near zero loss of chemical to high viscosity polyimides. Original factory parts, units tested to original factory specifications by certified technicians. The most efficient service in the industry. From single to multiple point dispense, small or larger volume, solvent or developer needs.
Our products support a wide range of applications, from low viscosity resists with near zero loss of chemical to high viscosity polyimides. Original factory parts, units tested to original factory specifications by certified technicians. The most efficient service in the industry. From single to multiple point dispense, small or larger volume, solvent or developer needs.
Services
In days of more expensive and delicate chemistries, it is not enough to work with only one technology or method. Different production requirements dictate flexibility to respond to changing situations with an integrated approach. This is the essence of our company. Together, the IDI and CYBOR product lines represent an installed base of many thousands of systems operating in virtually every major fab in the world.
The Model 300 family of dispense products is always changing to meet the needs of the Semiconductor industry. We currently provide models to dispense up to 1 liter per dispense, and units to dispense corrosive chemistries. The units can monitor a bulk fill canister and signal either the operator or a bulk fill supply to refill the canister.
The IDI-M310 Series Pressure-On-Demand Pump, POD, technology pump provides automated dispense control for the develop, Edge Bead Removal, (EBR), and Solvent Pre-wet process. The IDI-CYBOR patented POD provides bubble free, uniform flow rates that far exceed any results from a pressurized canister. The units have no mechanical displacement and are engineered to dispense a variety of photolithography chemicals.
Using IDI-CYBOR's patented Pressure-On-Demand, POD, technology, the M450 pump provides superior dispense control for troublesome fluids such as anti-reflective coatings, ARC, BARC, TARC. The unique design of the M450's reservoir with its top fill and bottom extraction design allows the natural separation of entrapped air bubbles.
For nearly a decade, IDI-CYBOR has been the leaders in innovative chemical dispense solutions. Based upon the field proven Pressure-On-Demand Technology, IDI-CYBOR introduces the M550 chemical dispense system for Spin on Glass (SOG) and Low K Dielectric applications.
Using IDI's patented pressure on demand (POD) technology, the M550 provides superior particle reduction; dispense accuracy, chemical minimization characterization, and high reliability in a compact design.With an MTBF of over 1 million dispenses with no schedule maintenance, IDI is continuing to lead the industry in quality and superior technology.
Using IDI's patented pressure on demand (POD) technology, the M550 provides superior particle reduction; dispense accuracy, chemical minimization characterization, and high reliability in a compact design.With an MTBF of over 1 million dispenses with no schedule maintenance, IDI is continuing to lead the industry in quality and superior technology.
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